Enhancement of Gas Response of ZnO Micro-nano Structured Films through O_2 Plasma Treatment
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概要
- 論文の詳細を見る
Layers of ZnO micro-nano structures were deposited on quartz substrates and subsequently plasma treated in O2 and N2. It was found that exposure to O2 plasma enhanced gas response to ethanol vapor of the ZnO layers by a factor eight, while exposure to N2 plasma deteriorated the gas response. The gas response enhancement upon O2 plasma treatment could be correlated to an increase in the layer resistance combined with surface roughening of the original ZnO tetrapod structure, suggesting the formation of a ZnO surface with a high density of active sites for ambient oxygen adsorption and subsequent reaction with reducing gases such as ethanol vapor.
- 社団法人 電気学会の論文
- 2009-09-01
著者
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Delaunay Jean-jacques
Japan Sci. And Technol. Agency Crest
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DELAUNAY Jean-Jacques
Department of Mechanical Engineering, School of Engineering, The University of Tokyo
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YAMADA Ichiro
Department of Mechanical Engineering, School of Engineering, The University of Tokyo
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Shuzo Masaki
School Of Engineering The Univ. Of Tokyo
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Shuzo Masaki
Department Of Mechano-informatics Graduate School Of Information Science And Technology The Universi
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Shuzo Masaki
Department Of Engineering Synthesis School Of Engineering The University Of Tokyo
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Delaunay Jean-jacques
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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NAGATOMO Ippei
Department of Engineering Synthesis, School of Engineering, The University of Tokyo
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UCHINO Ryohei
Department of Engineering Synthesis, School of Engineering, The University of Tokyo
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LI Yanbo
Department of Engineering Synthesis, School of Engineering, The University of Tokyo
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Shuzo Masaki
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Li Yanbo
Department Of Endocrinology First Clinical Hospital Of Harbin Medical University
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Li Yanbo
Department Of Engineering Synthesis School Of Engineering The University Of Tokyo
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Nagatomo Ippei
Department Of Engineering Synthesis School Of Engineering The University Of Tokyo
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Uchino Ryohei
Department Of Engineering Synthesis School Of Engineering The University Of Tokyo
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Yamada Ichiro
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Yamada Ichiro
Department Of Agronomy Faculty Of Agriculture Tohoku University
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