Improved Infrared Position Sensitive Detector
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概要
- 論文の詳細を見る
This paper presents an improved infrared position sensitive detector (IRPSD) that is operated in a vacuum condition. IRPSD is a two-dimensional infrared array sensor with two thermometers in each pixel. One thermometer is serially connected in a row and the other is serially connected in a column. The serial connection of these thermometers produces the sum of signals from all pixels in each row and column. With this array architecture, IRPSD extracts specific information without digital image processing. In this study, we developed an IRPSD that uses thermopiles as thermometers. To achieve high responsivity and large signal-to-noise ratio, we optimized the pattern layout of the pixel, considering thermal conductance and Johnson noise. As a result, responsivity of about 170 V/W was obtained.
- 社団法人 電気学会の論文
- 2009-07-01
著者
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Yamamoto Ikuo
Semiconductor Center Kodenshi Co. Ltd.
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Yoshioka Fumio
Quality Assurance Department Kodenshi Co. Ltd.
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Takahata Akihiro
Ic Process Development Kodenshi Co. Ltd.
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SHIMADA Yoshiharu
NEW DEVICE Development, Kodenshi Co., LTD.
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YOSHIDA Masashi
Marketing Section, Kodenshi Co., LTD.
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KIMATA Masafumi
College of Science and Engineering, Ritsumeikan University
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KANO Takashi
College of Science and Engineering, Ritsumeikan University
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Kimata Masafumi
College Of Science And Engineering Ritsumeikan University
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Shimada Yoshiharu
New Device Development Kodenshi Co. Ltd.
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Kano Takashi
College Of Science And Engineering Ritsumeikan University
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Yoshida Masashi
Marketing Section Kodenshi Co. Ltd.
関連論文
- Improved Infrared Position Sensitive Detector
- Vacuum Packaging Technology for Uncooled Infrared Sensor