Theoretical Study of Acceptor--Donor Complexes in 4H-SiC
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概要
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The total energies and electronic structures of acceptor--donor complexes in 4H-SiC were investigated using ab initio calculation methods. Our calculations covered the A2D complex consisting of substitutional two-acceptor atoms from group-III elements and a nitrogen (N) donor atom. Results indicate some A2D complexes can exist stably, and solid solubilities of Al2N and Ga2N may be greatly enhanced. We also found that Ga2N introduces a shallower acceptor level compared to conventional acceptor atoms such as B and Al. Our results suggest that Ga+/N+ co-implantation is one of the promising candidates for a doping method to realize low-resistivity p-type 4H-SiC.
- 2008-11-25
著者
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Miyata Masanori
Graduate School Of Science And Technology Kwansei Gakuin University
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Hayafuji Yoshinori
Graduate School Of Science And Technology Kwansei Gakuin University
関連論文
- Theoretical Study of the Stability of X@B6 and X@B12 Clusters: $\text{X}=\text{H--Br}$ in Crystalline Silicon
- Electronic Structures of 4H-SiC with Group I and VII Elements: First-Principles Study of Possible p-Type Doping
- Theoretical Study of Acceptor--Donor Complexes in 4H-SiC