A Three-Electrode Reactor for PE CVD - New Possibilities in the Thin Film Technology
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-05-25
著者
-
TYCZKOWSKI J.
Center of molecule and Macro molecule of Studies Polish Academy of Sciences
-
Pietrzyk B.
Center For Molecular And Macromolecular Studies Polish Academy Of Sciences
-
Tyczkowski J.
Center For Molecular And Macromolecular Studies Polish Academy Of Sciences
-
GAZICKI M.
Center for Molecular and Macromolecular Studies Polish Academy of Sciences
-
SZYMANOWSKI H.
Center for Molecular and Macromolecular Studies Polish Academy of Sciences
関連論文
- 窒素リモートプラズマCVD法によるSiCxNy薄膜の形成
- A Three-Electrode Reactor for PE CVD - New Possibilities in the Thin Film Technology