Novel Ta-precursors for the CVD and ALD of TaN_x diffusion barrier layers
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Stolz Wolfgang
Material Sciences Center And Department Of Physics And Chemistry
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POKOJ Michael
Material Sciences Center and Department of Physics and Chemistry
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NEMETH Igor
Material Sciences Center and Department of Physics and Chemistry
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VOLZ Kerstin
Material Sciences Center and Department of Physics and Chemistry
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GAESS Daniel
Material Sciences Center and Department of Physics and Chemistry
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MERKOULOV Alexei
Material Sciences Center and Department of Physics and Chemistry
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SUNDERMEYER Jorg
Material Sciences Center and Department of Physics and Chemistry