A lithographical method by oxidization through a conductive template in contact with a silicon substrate mediated by a thin water layer
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Kuo Chang-shu
Department Of Materials Science And Engineering National Cheng Kung University
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Liao Jiunn-der
Center For Micro/nano Science And Technology National Cheng Kung University
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HSIEH Chi-Hsiang
Center for Micro/nano Science and Technology, National Cheng Kung University
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HUANG Chao-Yu
Center for Micro/nano Science and Technology, National Cheng Kung University
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WU Bo-Hsiung
Center for Micro/nano Science and Technology, National Cheng Kung University
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Wu Bo-hsiung
Center For Micro/nano Science And Technology National Cheng Kung University
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Huang Chao-yu
Center For Micro/nano Science And Technology National Cheng Kung University
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Hsieh Chi-hsiang
Center For Micro/nano Science And Technology National Cheng Kung University
関連論文
- A lithographical method by oxidization through a conductive template in contact with a silicon substrate mediated by a thin water layer
- Lithographical Method by Oxidation through a Conductive Template in Contact with a Silicon Substrate Mediated by a Thin Water Layer