Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-Step VLS Growth
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Ishida M.
Dept. Physiol., Mie Univ. Sch. Med.
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Ikedo A.
Dept. Of Electrical And Electronic Engineering Toyohashi Univ. Of Technology
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FUNAGAYAMA N.
Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology
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KAWASHIMA T.
Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology
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TAKAO H.
Intelligent Sensing System Research Center, Toyohashi Univ. of Technology
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SAWADA K.
Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology
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Funagayama N.
Dept. Of Electrical And Electronic Engineering Toyohashi Univ. Of Technology
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