Reduction of Parasitic Resistance of Self-Aligned Copper Germanide for Germanium p-MOSFETs

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概要

• 論文の詳細を見る
• 2006-09-13

著者

• Woo Jason

  Dept. Of Electrical Engineering Ucla

• CHAO Yu-Lin

  Dept. of Electrical Engineering, UCLA

• Chao Yu-lin

  Dept. Of Electrical Engineering Ucla

関連論文

• Reduction of Parasitic Resistance of Self-Aligned Copper Germanide for Germanium p-MOSFETs

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