Diffusion Barrier Property of an Interface Layer Formed with Cu-Mn, Al and Mg Alloy Films on SiO_2
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Haneda M.
Dept. Of Biol. Fac. Of Sci. Okavama Univ.
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Haneda M.
Dept. Of Materials Science Tohoku University
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Iijima J.
Dept. Of Materials Science Tohoku University
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KOIKE J.
Dept. of Materials Science, Tohoku University
関連論文
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- Diffusion Barrier Property of an Interface Layer Formed with Cu-Mn, Al and Mg Alloy Films on SiO_2