Impact of (111)-Oriented SrRuO_3/Pt Tailored Electrode for Highly Reproducible Preparation of MOCVD-PZT Film for High Density FeRAM
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Funakubo H.
Tokyo Institute Of Technology Department Of Innovative And Engineered Materials
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MENOU N.
Tokyo Institute of Technology, Department of Innovative and Engineered Materials
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KUWABARA H.
Tokyo Institute of Technology, Department of Innovative and Engineered Materials
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Menou N.
Tokyo Institute Of Technology Department Of Innovative And Engineered Materials