A Capacitive-Sensing Scheme for Control of Adaptive MEMS Device Stacked on CMOS LSI
スポンサーリンク
概要
- 論文の詳細を見る
- 2006-09-13
著者
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Ugajin M.
Ntt Microsystem Integration Laboratories
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SHIMAMURA T.
NTT Microsystem Integration Laboratories
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MORIMURA H.
NTT Microsystem Integration Laboratories
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KUWABARA K.
NTT Microsystem Integration Laboratories
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SATO N.
NTT Microsystem Integration Laboratories
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TERADA J.
NTT Microsystem Integration Laboratories
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SHIGEMATSU S.
NTT Microsystem Integration Laboratories
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MACHIDA K.
NTT Advanced Technology Corporation
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NAKANISHI M.
NTT Microsystem Integration Laboratories
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ISHII H.
NTT Microsystem Integration Laboratories
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