Mo_XSi_YN_Z Metal Gate Electrode with Tunable Work Function for Advanced CMOS
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Kim J.
School of Electrical Engineering, Seoul National University
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Kim M.
Dept. Of Electrical Engineering University Of Texas At Dallas
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Kim M.
Dept. Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Technol
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ZHAO P.
Dept. of Electrical Engineering, University of Texas at Dallas
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GNADE B.
Dept. of Electrical Engineering, University of Texas at Dallas
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WALLACE R.
Dept. of Electrical Engineering, University of Texas at Dallas
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Gnade B.
Dept. Of Electrical Engineering University Of Texas At Dallas
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Kim J.
School Of Electrical Engineering Seoul National University
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Wallace R.
Dept. Of Electrical Engineering University Of Texas At Dallas
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Kim J.
School of Earth and Environmental Sciences,Seoul National University
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