Analysis of NiSi Fully-silicided Gate on SiO_2 and HfO_2 for CMOS Application
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Tsui Bing
Department Of Electronics Engineering National Chiao-tung University
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Huang Chih
Department Of Electronics Engineering National Chiao-tung University