A Novel Short-time Characterization Method of SIV Properties by Using the Empirical Equation
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Mitsu N.
Matsushita Semi-conductor Engineering Co. Ltd.
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TAKAHASHI M.
Matsushita Semi-Conductor Engineering Co. Ltd.
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HARADA T.
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co
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TSUKAMOTO K.
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co
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OGAWA S.
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co
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UEDA T.
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co