Molecular Dynamics (MD) Calculation for Low-energy Ion Implantation Process with Dynamic Annealing Effect
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Won Taeyoung
National It Research Center For Computational Electronics And Department Of Electrical Engineering S
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Kwon Ohseob
National It Research Center For Computational Electronics And Department Of Electrical Engineering S
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Kim Kidong
National It Research Center For Computational Electronics And Department Of Electrical Engineering S
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SEO Jihyun
National IT Research Center for Computational Electronics and Department of Electrical Engineering,
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Seo Jihyun
National It Research Center For Computational Electronics And Department Of Electrical Engineering S