Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layer in Nano-Scale CMOSFETs
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Kim K.
System Ic Pd Center Hynix Semiconductor Inc.
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Lee H.
Dept. Of Ob & Gyn And Psychiatry Medical College Korea University
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Lee H.
System Ic Pd Center Hynix Semiconductor Inc.
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Park S.
System Ic Pd Center Hynix Semiconductor Inc.
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Lee H.
Dept. Of Electronics Engineering Chungnam National University
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Park J.
System Ic Pd Center Hynix Semiconductor Inc.
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Kim Y.
Dept. Of Electronics Engineering Chungnam National University
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JI H.
Dept. of Electronics Engineering, Chungnam National University
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BAEK S.
System IC PD Center, Hynix Semiconductor Inc.
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SONG B.
System IC PD Center, Hynix Semiconductor Inc.
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BAE H.
System IC PD Center, Hynix Semiconductor Inc.
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KANG Y.
System IC PD Center, Hynix Semiconductor Inc.
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KIM D.
System IC PD Center, Hynix Semiconductor Inc.
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Baek S.
System Ic Pd Center Hynix Semiconductor Inc.
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