(AlGa)As Composition Profile Analysis of Trenches Overgrown with MOVPE
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Christen Jurgen
Otto-von-guericke-universitat Magdeburg
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HOFMANN Lars
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
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RUDLOFF Dirk
Otto-von-Guericke-Universitat Magdeburg
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RECHENBERG Ingrid
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
関連論文
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- (AlGa)As Composition Profile Analysis of Trenches Overgrown with MOVPE