Enhanced Recovery from Back-End Process Damage by Conductive Perovskite Electrode for BST Capacitor
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Nitayama A.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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Hieda K.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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Natori K.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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FUKUZUMI Y.
Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company
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IZUHA M.
Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company
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EGUCHI K.
Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company
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ISHIBASHI Y.
Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company
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KOHYAMA Y.
Microelectronics Engineering Laboratory, Toshiba Corporation Semiconductor Company
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Izuha M.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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Fukuzumi Y.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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Eguchi K.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company
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Kohyama Y.
Microelectronics Engineering Laboratory Toshiba Corporation Semiconductor Company