Anomalous Hot Carrier Degradation of nMOSFETs with an Ultra-Shallow Source/Drain Extension

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概要

• 論文の詳細を見る
• 1999-09-20

著者

• Murakami Eiichi

  Ulsi Research Department Central Research Laboratory Hitachi Ltd.

• Nakamura Kaori

  Ulsi Research Department Central Research Laboratory Hitachi Ltd.

• Kimura Shin'ichiro

  Ulsi Research Department Central Research Laboratory Hitachi Ltd.

関連論文

• Anomalous Hot Carrier Degradation of nMOSFETs with an Ultra-Shallow Source/Drain Extension

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