ポリスチレン系標準粒子の製造とその利用
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概要
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This paper reviews the preparation method of polystyrene standard particles and their industrial applications. The polystyrene standard particles are synthesized in water by an emulsion polymerization method followed by refining. They are supplied as standard particles after determination of particle sizes. Although they are used mostly for calibration and verification of instruments for the cleanliness measurement and contamination control including fine particle counters, the application fields extends to an extremely wide range of products, for example semiconductors, micro-machining of liquid crystals, pharmacy, and drinking water. Due to the wide variety of applications, not only the particle size but also the particle number concentrations are becoming more important. Since there exist many JIS standards and regulations based on the polystyrene standard particles, they are now playing a vital role as a nano-scale rule measure in addition to the micro-scale measure.
- 2007-12-20