Effect of CH/C_2 Species Density on Surface Morphology of Diamond Film Grown by Microwave Plasma Jet Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2008-06-01
著者
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Chang Ching-yu
Graduate Institute Of Mechanical And Electrical Engineering National Taipei University Of Technology
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SU Chun-Hsi
Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technolog
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Su Chun-hsi
Graduate Institute Of Mechanical And Electrical Engineering National Taipei University Of Technology