La_<0.5>Sr_<0.5>CoO_3の放電カソード材料としての電気特性

概要

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The La0.5Sr0.5CoO3 was used as a cathode for the first time when the plasma display panel was used on the handheld personal computer. It has favorable sputtering resistance characteristic and stable discharge characteristic in gases. In this report, the electrical characteristics of the La0.5Sr0.5CoO3 was investigated through an analysis of the DC plasma panel which was made as prototype. The dimensions of the test plasma panel were measured exactly by the end-measuring machine, and its electric properties were estimated. On the analysis of the DC plasma panel, LaB6 and metal Ni cathode were investigated in the same way, and the comparative analysis was carried out. From the analysis in sputtering experiment that was conducted in the AC-type sputtering apparatus, the sputter rate of La0.5Sr0.5CoO3 is greater than the LaB6s one, while the sputter rate of La0.5Sr0.5CoO3 that is used as a cathode, is smaller than others. The La0.5Sr0.5CoO3 has larger secondary-emission coefficient γ than LaB6 or metal Ni. It was presumed that La0.5Sr0.5CoO3s larger secondary-emission coefficient γ reduce the sputter rate when it is used as a cathode.
社団法人電気学会の論文
2008-04-01