Liquid phase patterning of ceramic films (特集 自然に学ぶプロセス)
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概要
- 論文の詳細を見る
Liquid Phase Patterning (LPP) of ceramic thin films were realized in the solutions using self-assembled monolayers (SAMs). The processes were developed based on scientific knowledge obtained from investigations of interactions and chemical reactions between functional groups of SAMs and ions, clusters and homogeneously nucleated particles in solutions. Several conceptual processes for LPP using SAMs as templates were proposed, and nano/micropatterns of ceramic thin films such as TiO2, Fe3O4, ZnO, etc. were successfully fabricated. The studies showed the good performance of environment-friendly chemistry for the fabrication of nano/micro ceramic devices.
- 社団法人粉体粉末冶金協会の論文
- 2007-12-15
著者
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MASUDA Yoshitake
National Institute of Advanced Industrial Science and Technology (AIST)
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Masuda Yoshitake
National Inst. Of Advanced Industrial Sci. And Technol. (aist)
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