Recent Topics in R&D of the Plasma-Based Ion Process

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概要

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• The plasma-based ion implantation and deposition (PBII&D) is a powerful tool to modify surface properties of solid materials. Its application fields are extending from those in mechanical engineering in the beginning to those in nano-materials science, biomedical engineering and micro-to-nano-electronics. In the present paper, It is tried to introduce recent topics in the research and development of PBII&D from papers of the international workshop on PBII&D, Leipzig, 2007.

• 社団法人 電気学会の論文
• 2008-01-01

著者

• Ikehata Takashi

  Institute Of Applied Beam Science Ibaraki University

関連論文

• Cross-Field Propagation of Intense Pulsed Ion Beams
• Propagation of Intense Pulsed Ion Beams across a Magnetic Field
• Cross-Field Propagation of Intense Neutralized Proton Beam near a Metal Plate
• Recent Topics in R&D of the Plasma-Based Ion Process

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