Ultraviolet Assisted Thermal Processing of SiOCH Zeolite Extreme Low-k Dielectric Materials
スポンサーリンク
概要
- 論文の詳細を見る
- 2007-07-12
著者
-
Van Schravendijk
Pecvd Business Unit Novellus Systems Inc.
-
WU Qingguo
PECVD Business Unit, Novellus Systems, Inc.
-
ANTONELLI G.
PECVD Business Unit, Novellus Systems, Inc.
-
BANERJI Ananda
PECVD Business Unit, Novellus Systems, Inc.
-
SRIRAM Mandyam
PECVD Business Unit, Novellus Systems, Inc.
-
VARADARAJAN Sesha
PECVD Business Unit, Novellus Systems, Inc.
-
Banerji Ananda
Pecvd Business Unit Novellus Systems Inc.
-
Wu Qingguo
Pecvd Business Unit Novellus Systems Inc.
-
Antonelli G.
Pecvd Business Unit Novellus Systems Inc.
-
Sriram Mandyam
Pecvd Business Unit Novellus Systems Inc.
-
Varadarajan Sesha
Pecvd Business Unit Novellus Systems Inc.