Numerical Analysis for Electromigration of Cu Atom

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概要

• 論文の詳細を見る
• 2007-09-01

著者

• Yokobori A.

  Tohoku Univ. Graduated School Of Engineering

• NEMOTO Takenao

  Tohoku Univ. Graduated School of Engineering

• MURAKAWA Tutomu

  Tohoku Univ. Graduated School of Engineering

• Yokobori Jr.

  Tohoku Univ. Graduated School of Engineering

関連論文

• Numerical Analysis for Electromigration of Cu Atom
• End-Point Detection of Ta/TaN Chemical Mechanical Planarization via Forces Analysis

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