Vacuum Lithography Using Plasma Polymerization and Plasma Development
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概要
- 論文の詳細を見る
- 1997-12-15
著者
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Park Gu-bum
Dept. Of Electrical Eng. Yu Han College
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Lee Duck-chool
Functional Thin Films Lab. Dept. Of Electrical Eng. Inha Univ.
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Park Bok-kee
Dept. Of Electrical Eng. Chon Buk San Up Univ.
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KIM Sung-O
Functional Thin Films Lab., Dept. of Electrical Eng., INHA UNIV.
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CHO Ki-Sun
Dept. of Electrical Eng., YU HAN COLLEGE
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Cho Ki-sun
Dept. Of Electrical Eng. Yu Han College
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Kim Sung-o
Functional Thin Films Lab. Dept. Of Electrical Eng. Inha Univ.