Spatial Distribution of Fragment Ions from CF_4 in RF Plasma

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概要

• 論文の詳細を見る
• 2001-04-19

著者

• SAKUDO N.

  Kanazawa Institute of Technology

• Yutani M.

  Kanazawa Institute Of Technology

• HAYASHI K.

  Kanazawa Institute of Technology

• MIZUTANI D.

  Kanazawa Institute of Technology

• YOSHIDA M.

  Kanazawa Institute of Technology

関連論文

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• Modifying inner surface of a PET bottle by plasma-based ion implantation
• Spatial Distribution of Fragment Ions from CF_4 in RF Plasma

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