A Low-Pressure Limit of Diamond Chemical-Vapor Deposition Studied by Plasma Diagnostics

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概要

• 論文の詳細を見る
• 2003-12-16

著者

• Teii K.

  Kyushu University

• HORI M.

  Nagoya University

• GOTO T.

  Nagoya University

関連論文

• Temporal Variation of Nucleation Density and Crystallinity of Diamond Prepared in Electron Cyclotron Resonance Plasma
• A Low-Pressure Limit of Diamond Chemical-Vapor Deposition Studied by Plasma Diagnostics

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