Surface characterization of SiO_2 films converted from perhydropolysilazane by curing treatment

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概要

• 論文の詳細を見る
• 2006-11-08

著者

• Komotori Jun

  Department Of Mechanical Engineering Keio University

• SHINDO Toyohiko

  Contamination Control Services

• Haze Masakiyo

  Graduate School Of Science And Technology Keio University

• KAMIDE Atsushi

  Department of Mechanical Engineering, Keio University

• Kamide Atsushi

  Department Of Mechanical Engineering Keio University

• Shindo Toyohiko

  Contamination Control Services Inc

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• Surface characterization of SiO_2 films converted from perhydropolysilazane by curing treatment
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