Enhancement of Nucleation Density in Plasma CVD by Ultra-short High-voltage Pulses
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概要
- 論文の詳細を見る
- 1995-05-01
著者
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Yasuda Shin-ichi
Research Center For Carbon Recycling And Utilization Tokyo Institute Of Technology
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OKAZAKI Ken
Research Center for Carbon Recycling and Utilization
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Okazaki Ken
Research Center For Carbon Recycling And Utilization Tokyo Institute Of Technology
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- Enhancement of Nucleation Density in Plasma CVD by Ultra-short High-voltage Pulses
- Investigation for the Stability of CO2 Clathrate-Hydrate Using Molecular Dynamics Simulation
- Highly-Nonequilibrium Plasma Chemistry at Atmospheric Pressure and Temperature in the Control of Material Conversion Processes