Processing of Three Dimensional Components and its Applications

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概要

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• The plasma-ion processing of three-dimensional components tends to expand various fields from microelectronics to environmental industries. The recent trend is not only surface modification by thin film prepared by reactive deposition using a metallic plasma source generated in reactive gases, but also deep layer ion-penetration of the component using thermal diffusion. The substrates are immersed in the plasma and are pulse-biased with a low voltage. This article introduces the plasma-ion processing for three dimensional components, and its merits and drawbacks, and examples of the applications are also shown.

• 社団法人 電気学会の論文
• 2007-01-01

著者

• Yukimura Ken

  Plasma Application Laboratory Department Of Electrical Engineering Doshisha University

関連論文

• Processing of Three Dimensional Components and its Applications

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