Studies of Novel Copolymers for Deep-UV Photoresists. I. Synthesis and Properties of Poly(Styrene-co-Silicon-containing maleimide)
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概要
- 論文の詳細を見る
- Society of Polymer Science, Japanの論文
- 2006-09-15
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関連論文
- Synthesis and Characteristics of Phosphonate-Containing Maleimide Polymers
- Studies of Novel Copolymers for Deep-UV Photoresists. I. Synthesis and Properties of Poly(Styrene-co-Silicon-containing maleimide)