A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2006-03-20
著者
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Qiu C.
The Key Lab Of Integrated Circuits Heilongjiang University
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ZHANG H.
The Key Lab of Integrated Circuits, Heilongjiang University