Miniaturized SAW Motor with 100MHz Drive Frequency
スポンサーリンク
概要
- 論文の詳細を見る
Utilization of 100 MHz drive frequency miniaturized a surface acoustic wave (SAW) motor down to 3x12.5x2.5 mm3. A slider fabricated with hemispheric projections enabled the 100 MHz frequency drive. Despite the diminutive size of the actuator, the miniaturized SAW motor performed up to 0.3 m/s high speed and 13 mN high output force.
- 社団法人 電気学会の論文
- 2006-04-01
著者
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Shigematsu Takashi
Tokyo Inst. Technol. Yokohama Jpn
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SHIGEMATSU Takashi
Dept. Information Processing, Tokyo Institute of Technology
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KURIBAYASHI KUROSAWA
Dept. Information Processing, Tokyo Institute of Technology
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Kuribayashi Kurosawa
Dept. Information Processing Tokyo Institute Of Technology
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Shigematsu Takashi
Dept. Information Processing Tokyo Institute Of Technology