N_2O-Anneal Induced Local Thinning of Regrown Oxide due to Nitrogen Residue at LOCOS Isolation Edges
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Huang Chimoon
Macronix International Co. Ltd
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SUNG K.
Macronix International Co., LTD
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PENG N.
Macronix International Co., LTD
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CHAO M.
Macronix International Co., LTD
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CHANG Y.
Macronix International Co., LTD
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SHONE F.
Macronix International Co., LTD
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Shone F.
Macronix International Co. Ltd
関連論文
- N_2O-Anneal Induced Local Thinning of Regrown Oxide due to Nitrogen Residue at LOCOS Isolation Edges