Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process
スポンサーリンク
概要
- 論文の詳細を見る
- 1996-08-26
著者
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Yasumura K.
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Shiozawa K.
Advanced Technology R&d Center Mitsubishi Electric Corporation
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OISHI T.
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MAEDA H.
ULSI Laboratory, Mitsubishi Electric Corporation
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MURAKAMI T.
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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ABE Y.
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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TOKUDA Y.
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Tokuda Y.
Advanced Technology R&d Center Mitsubishi Electric Corporation