Demonstration of an Electronic Grade Ti/AlN/Si Metal-Insulator-Semiconductor Capacitor
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概要
- 論文の詳細を見る
- 1996-08-26
著者
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Kung P.
Center For Quantum Devices Eecs Department Northwestern University
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ZHANG X.
Center for Quantum Devices, EECS Department, Northwestern University
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WALKER D.
Center for Quantum Devices, EECS Department, Northwestern University
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SAXLER A.
Center for Quantum Devices, EECS Department, Northwestern University
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XU J.
Center for Quantum Devices, EECS Department, Northwestern University
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RAZEGHI M.
Center for Quantum Devices, EECS Department, Northwestern University
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Razeghi M.
Center For Quantum Devices Eecs Department Northwestern University
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Saxler A.
Center For Quantum Devices Eecs Department Northwestern University
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Walker D.
Center For Quantum Devices Eecs Department Northwestern University