Polysilicon Encapsulated LOCOS for Deep Submicron CMOS Lateral Isolation

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概要

• 論文の詳細を見る
• 1996-08-26

著者

• De Wolf

  Imec Leuben Bel

• BADENES Goncal

  IMEC

• ROOYACKERS Rita

  IMEC

• DEFERM Ludo

  IMEC

• Deferm Ludo

  Imec Advanced Semiconductor Processing Division

• Badenes Goncal

  Imec Advanced Semiconductor Processing Division

• ROOYACKERS Rita

  IMEC, Advanced Semiconductor Processing Division

• Rooyackers Rita

  Imec Advanced Semiconductor Processing Division

• DE WOLF

  IMEC

関連論文

• Polysilicon Encapsulated LOCOS for Deep Submicron CMOS Lateral Isolation
• Silicide Engineering to Boost Si Tunnel Transistor Drive Current
• Polysilicon Encapsulated Local Oxidation of Silicon for Deep Submicron Lateral Isolation

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