CMP with Pad-Press Ring for Superior Uniformity Performance
スポンサーリンク
概要
- 論文の詳細を見る
- 1996-08-26
著者
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Hamanaka Masashi
Kyoto Research Laboratory Matsushita Electronics Corporation
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NISHIO Mikio
Semiconductor Research Center, Matsushita Electric Industrial, Co., Ltd.
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MURAKAMI Tomoyasu
Semiconductor Research Center, Matsushita Electric Industrial, Co., Ltd.
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Murakami Tomoyasu
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Nishio Mikio
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.