A New Approach of Photonic Bandgap Formation : Wafer Bonding and Delamination Technique
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Aga H.
Shin-etsu Handotai
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WADA K.
Department of Materials Science, Massachusetts Institute of Technology
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MITANI K.
Shin-Etsu Handotai
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ABE T.
Shin-Etsu Handotai
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SUEZAWA M.
Institute of Materials Research, Tohoku University
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KIMERLING L.
Department of Materials Science, Massachusetts Institute of Technology
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Kimerling L.
Department Of Materials Science Massachusetts Institute Of Technology
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