Fluoropolymer and Aerogel Thin Films as Low Dielection in IC Metallization
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Uhlig M.
Center Of Microtechnolgies Chemnitz University Of Technology
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SCHULZ S.
Center of Microtechnolgies, Chemnitz University of Technology
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BERTZ A.
Center of Microtechnolgies, Chemnitz University of Technology
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STREITER R.
Center of Microtechnolgies, Chemnitz University of Technology
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WEISS U.
Center of Microtechnolgies, Chemnitz University of Technology
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WERNER T.
Center of Microtechnolgies, Chemnitz University of Technology
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WINKLER T.
Center of Microtechnolgies, Chemnitz University of Technology
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GESSNER T.
Center of Microtechnolgies, Chemnitz University of Technology
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Bertz A.
Center Of Microtechnolgies Chemnitz University Of Technology
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Gessner T.
Center Of Microtechnolgies Chemnitz University Of Technology
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Streiter R.
Center Of Microtechnolgies Chemnitz University Of Technology
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Winkler T.
Center Of Microtechnolgies Chemnitz University Of Technology
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Schulz S.
Center Of Microtechnolgies Chemnitz University Of Technology
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Weiss U.
Center Of Microtechnolgies Chemnitz University Of Technology