Ultra Thin SrBi_2Ta_2O_9 Ferroelectric Films Grown by Liquid Source CVD Using BiOx Buffer Layers

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概要

• 論文の詳細を見る
• 1998-09-07

著者

• ARIMOTO Y.

  Fujitsu Laboratories Ltd.

• Eshita T.

  Fujitsu Laboratories Ltd.

• Eshita T.

  Fujitsu Laboratories Limited

• Yamawaki H.

  Fujitsu Laboratories Ltd.

• MIYAGAKI S.

  FUJITSU LABORATORIES LTD.

• Arimoto Y.

  Fujitsu Laboratories Limited

関連論文

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• Ultra Thin SrBi_2Ta_2O_9 Ferroelectric Films Grown by Liquid Source CVD Using BiOx Buffer Layers

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