Calibration of TCAD Models for High Dose Impurity Diffusion
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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Aoki Eiji
Vlsi Development Laboratories Sharp Corporation
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Nishio Osamu
Vlsi Development Laboratories Sharp Corporation
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TAKENAKA Masahiro
VLSI Development Laboratories, SHARP Corporation
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MIZUKOSHI Norio
VLSI Development Laboratories, SHARP Corporation
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FUJII Katsumasa
VLSI Development Laboratories, SHARP Corporation
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Mizukoshi Norio
Vlsi Development Laboratories Sharp Corporation
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Fujii Katsumasa
Vlsi Development Laboratories Sharp Corporation
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Takenaka Masahiro
Vlsi Development Laboratories Sharp Corporation