The Effect of Capacitor Electrode Contaminant on High Density DRAM's Device Characteristics
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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Yoshimaru M.
Oki Electric Industry Co. Ltd. Vlsi R&d Center
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KAWAI Y.
Oki Electric Industry Co., Ltd. VLSI R&D Center
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UCHIDA E.
Oki Electric Industry Co., Ltd. VLSI R&D Center
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ITOH M.
Oki Electric Industry Co., Ltd. VLSI R&D Center
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IDA J.
Oki Electric Industry Co., Ltd. VLSI R&D Center