Low k Dielectric Materials for ULSI Interconnects : Materials Science Issues
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概要
- 論文の詳細を見る
- 1997-06-05
著者
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Mckerrow Andrew
Center For Materials Science And Engineering The University Of Texas At Austin
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TODD RYAN
Center for Materials Science and Engineering The University of Texas at Austin
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HO Paul
Center for Materials Science and Engineering The University of Texas at Austin