Serpentine Spring Corner Designs for Micro-Electro-Mechanical Systems Optical Switches with Large Mirror Mass
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概要
- 論文の詳細を見る
- 2005-08-01
著者
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Jiang Fukang
Umachines Inc.
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SU Guo-Dung
National Taiwan University, Graduate Institute of Electro-Optical Engineering
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HUNG Shao
National Taiwan University, Graduate Institute of Electro-Optical Engineering
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JIA Dexin
National Taiwan University, Graduate Institute of Electro-Optical Engineering
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Hung Shao
National Taiwan University Graduate Institute Of Electro-optical Engineering
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Jia Dexin
National Taiwan University Graduate Institute Of Electro-optical Engineering
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Su Guo-dung
National Taiwan University Graduate Institute Of Electro-optical Engineering