Monitoring Degradation of Source/Drain Extension in Sub-Quarter-Micron MOSFET's
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Li M.
Sndl And Cicfar Department Of Electrical & Computer Engineering National University Of Singapore
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CHEN G.
SNDL and CICFAR, Department of Electrical & Computer Engineering, National University of Singapore
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LI X.
SNDL and CICFAR, Department of Electrical & Computer Engineering, National University of Singapore
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YU X.
Chartered Semiconductor Manufacturing Ltd.