Dishing-Free Cu Chemical Mechanical Polishing Process Based on Endpoint Detection with Laser Beam
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Ogawa H.
Department Of Applied Chemistry Faculty Of Engineering Kyushu Institute Of Technology
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Horiike Y.
Department Of Materials Science School Of Engineering The University Of Tokyo
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KIKUCHI J.
Axiomatec Inc.
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TOKUYAMA Y.
Department of Materials Science, School of Engineering, The University of Tokyo
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YANAGISAWA M.
Speedfam Co., Ltd.
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NAKAGAWA H.
Semiconductor Company, Matsushita Electric Industrial Co., Ltd
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Tokuyama Y.
Department Of Materials Science School Of Engineering The University Of Tokyo
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