Thermal Plasma Chemical Vapor Deposition of SiC
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概要
- 論文の詳細を見る
- 1995-11-15
著者
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Doi Masayuki
Hitachi Research Laboratory Hitachi Ltd.
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KOJIMA Yoshitaka
Hitachi Research Laboratory, Hitachi Ltd.
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ANDOO Yasutaka
Hitachi Research Laboratory, Hitachi Ltd.
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Andoo Yasutaka
Hitachi Research Laboratory Hitachi Ltd.
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Kojima Yoshitaka
Hitachi Research Laboratory Hitachi Ltd.
関連論文
- Thermal Plasma Chemical Vapor Deposition of SiC
- Thermal Diffusivity Measurement for Thermal Spray Coating Attached to Substrate Using Laser Flash Method